Nano and Microfabrication Core

Engineering small devices for big discoveries

MBI’s µFabrication Core provides a full spectrum of micro- and nano-fabrication services — from initial design to finished device — for internal researchers, R&D partners, and external clients. With over 40 years of accumulated expertise, our team supports the design and fabrication of innovative micro-systems that advance our understanding of cells from a physical and mechanical perspective.

40+

Years of combined expertise

ISO7

Clean room facility

End-to-end

Fabrication chain

IN-HOUSE CAPABILITIES

The full fabrication chain, under one roof

Our in-house capabilities cover every step of the microfabrication process: 

Specialised technologies

EBL and nano-imprinting available via collaborations with local and international facilities and industry partners.

Micro-structure characterisation

Optical and SEM imaging, step profile measurement, and thickness and refractive index measurement.

Rapid prototyping

3D printing in thermoplastic polymers and UV-curing resins, plus small-scale CNC machining for plastic or soft metal.

APPLICATION EXAMPLES

Devices we help create

Our work spans topological features, geometrical stamps for protein patterning, force-sensing structures, and microfluidic and micro-optical systems for cell experiments. Current and recent projects include:

  • Micro/nanopillars
  • Protein stamping (PDMS & UV)
  • Microwells
  • Microfluidic devices
  • Surface topography
  • Diffuser lithography
  • Thermal reflow
  • Greyscale lithography
  • soSPIM

FACILITIES

Clean room and equipment

The µFabrication Core is housed within an ISO 7 class clean room at NUS T-Lab, with a yellow-light ISO 6 inner zone dedicated to UV lithography.

ISO 7 facility · Yellow-light ISO 6 inner zone for UV lithography
LITHOGRAPHY & PATTERNING
  • Heidelberg DWL66fs laser writer (greyscale & direct write)
  • MJB4 SUSS MicroTec mask aligner (Deep UV option)
  • Kloè UV-KUB UV-LED flood & mask exposure box (4″ substrate)
  • CEE spin coater
  • Prazitherm hot plates (photoresist baking)
 
ETCHING & DEPOSITION
  • Samco 10NR-RIE plasma etcher (CF4, SF6, Ar, O2)
  • Sentech 500Si ICP deep silicon etcher — Bosch-capable (CF4, SF6, CHF3, C4F8, Ar, O2)
  • AJA e-gun & thermal evaporator (Au, Cr, Ti, Cu)
  • Diener Pico plasma tool (300W max, O2 & Ar)
 
WET PROCESSING & OTHER
  • Solvents wet bench
  • Acid wet bench
  • Vacuum oven
  • Bruker Dektak contact profiler
  • Optical microscope (Olympus)
Characterisation, prototyping & support tools
CHARACTERISATION
  • SEM — JEOL JSM 6010LV
  • Reflectometer — Thetametrics FR-pRo (370–1000nm, 5×/20×/50× objectives)
 
SOFT LITHOGRAPHY & SURFACE TREATMENT
  • Laurell spin coater (PDMS)
  • Harrick plasma cleaner (O2)
  • Tergeo dual chamber plasma cleaner (O2)
  • Kloè UV-KUB UV-LED exposure box (up to 9″ substrate)
  • VO29 Memmert vacuum oven / degasser
 
PROTOTYPING
  • Prusa 3D printer
  • Formlabs Form 4B SLA 3D printer
  • Makera CNC machining tool (plastic or soft metal)
  • Laser cutter: Lionsforge CraftLaser
  • Bioprinter: CELLINK BioX
  • Electrospinner: Inovenso NS Plus
  • Leica coater: Leica EM ACE200 Coater (gold, and carbon coating)
  • Keyence Digital Upright Microscope (VHX-6000)

External enquiries

External users and R&D partners are welcome to submit an enquiry directly.

Internal project requests

MBI staff can submit project requests via the intranet portal.

Meet the Team

ASHRAF, Mohammed

Facility Manager

Jegan SHANMUGARAJAH

Research Assistant, 3D Printing, Prototyping, Operational/Procurement Support

FOO Sebastian Junwei

Microfabrication, 3D Printing, Safety

MONA, Suryana

Research Associate, Microfabrication Lead, SEM Imaging

Saburnisha Binte Mohamad RAFFI

Research Assistant, Soft lithography, CNC, Training Support