Nano and Microfabrication Core

Nano and Microfabrication Core

The µFabrication Core provides a spectrum of design and microfabrication services to our internal researchers, R&D partners, and external clients. Our team of engineers and researcher have over 40 years of accumulated knowledge and hands-on experience.

Visualization of the dynamic biological processes rely on advanced imagining technologies. The Microscopy Core is the largest of the MBI core facilities, serving as the backbone for most of the experimental work at the Institute. The Core supports image related research, offering a wide range of microscopes and image analysis resources.

Our in-house capabilities cover the entire micro-fabrication chain

SIMBA provides training to users on different imaging techniques and image processing software, as well as personalised and small group sessions to instruct and guide users on techniques ranging from sample preparation to data extraction. SIMBA utilises Artificial Intelligence (AI) algorithms in tandem with powerful computing resources to offer users advanced options to capture, analyse, segment and restore images with the best possible tools available. SIMBA is a leading contributor to Singapore’s Singascope, and a member of the Global Bioimaging network. Learn more about SIMBA at simba-mbi.com, including an overview of available equipment and image analysis tools, as well as a complete schedule of talks and presentations.

Nano and Microfabrication Core Teams

BEGHIN, Anne

Research Assistant Professor, Facility Manager

mbianne@nus.edu.sg

LIU Jun

Superresolution, FCS

mbilj@nus.edu.sg

CHIN Fei Li, Jasmine

Deputy Facility Manager, TIRF, Spinning Disk

mbicflj@nus.edu.sg

ONG Hui Ting

Image Processing

mbioht@nus.edu.sg

The µFabrication Core is located within an ISO7 class clean room (at NUS’ T-lab) with a yellow light ISO6 class inner zone, dedicated to UV lithography.

Currently, our equipment consists of:

  • Heidelberg DWL66 fs, laser writer for mask writing, with gray scale and direct writing capabilities
  • MJB4 SUSS MicroTec Mask aligner with Deep UV option
  • CEE Spin coater
  • Prazitherm Hot Plates (photo resist baking)
  • Kloè UV-KUB UV-LED flood and mask exposure box (for 4” substrate)
  • Samco 10NR-RIE plasma etching system, equipped with CF4, SF6, Ar and O2
  • Sentech 500Si ICP deep silicon plasma etcher, equipped with CF4, SF6, CHF3, C4F8, Ar and O2 capable of Bosch-type processes
  • AJA e-gun and thermal evaporator (Au, Cr, Ti and Cu)
  • Diener Pico plasma tool (300 W max power, O2 and Ar)
  • Vacuum oven
  • Solvents wet bench
  • Acid wet bench
  • 3Bruker Dektak Contact Profiler
  • Optical microscope (Olympus)

Non clean-room-based equipment includes:

  • SEM (JEOL JSM 6010LV)
  • Reflectometer (Thetametris FR-pRo with Miniaturized Spectrometer in 370-1000 nm range and 5x, 20x and 50x objectives)
  • VO29 Memmert Vacuum Oven/Degasser
  • Laurel Spin-coater (for PDMS)
  • Harrick plasma cleaner (with O2)
  • Tergeo dual chamber plasma cleaner (with O2)
  • Kloè UV-KUB UV-LED flood exposure box (up to 9” substrate)
  • Ultimaker 3, FDS 3D printer
  • Formlabs Form 3 SLA 3D printer
  • Charly 4U CNC machining tool (plastic or soft metal)
µFabrication Core Intranet [MBI staff only]

At the µFabrication Core, we help with the design and fabrication of micro-systems used to study biological systems from a physical and mechanical perspective.

Our focus lies, but is not limited to, topological features; geometrical stamps for protein stamping; pillars and cantilevers for force sensing, as well as microfluidic and micro-optical systems for cell experiments.

Some of the ongoing projects at MBI are:

  • Micro/nano pillars
  • Geometrical patterns for protein stamping (PDMS stamping; UV stamping)
  • Microwells
  • Micro fluidic devices
  • Surface topography (Diffuser lithography; Thermal reflow; Gray scale lithography)
  • soSPIM

External
External users may submit an inquiry to Mohammed Ashraf at mbima@nus.edu.sg

Internal
Internal users may submit a project request to the µFabrication Core by accessing openfreezer.mbi.nus.edu.sg [MBI staff only].

Location

Mechanobiology Institute, NUS
Level 5 T-Lab
National University of Singapore
5A Engineering Drive 1
Singapore 117411

mbi@nus.edu.sg

+65 6872 6123